Mar-2026 Tabular Data https://fordatis.fraunhofer.de/handle/fordatis/495
http://dx.doi.org/10.24406/fordatis/454

Research data - Article "Beyond thin film limits – superhard and hydrogen-free amorphous carbon coatings with over 100 µm thickness"

Zawischa, Martin (Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS)

IWS Fraunhofer-Institut für Werkstoff- und Strahltechnik
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Abstract

Research data generated using various methods for the research article “Beyond thin film limits – superhard and hydrogen-free amorphous carbon coatings with over 100 µm thickness”. This includes records of ta-C coating processes as well as characterization methods
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620 Ingenieurwissenschaften
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