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dc.contributor.authorZawischa, Martin-
dc.contributor.otherKaulfuß, Frank-
dc.contributor.otherMakowski, Stefan-
dc.contributor.otherWeihnacht, Volker-
dc.date.accessioned2026-03-30T15:47:30Z-
dc.date.available2026-03-30T15:47:30Z-
dc.date.issued2026-03-
dc.identifier.urihttps://fordatis.fraunhofer.de/handle/fordatis/495-
dc.identifier.urihttp://dx.doi.org/10.24406/fordatis/454-
dc.description.abstractResearch data generated using various methods for the research article “Beyond thin film limits – superhard and hydrogen-free amorphous carbon coatings with over 100 µm thickness”. This includes records of ta-C coating processes as well as characterization methodsen
dc.language.isodeen
dc.rights.urihttps://creativecommons.org/licenses/by-nc-nd/4.0/en
dc.subject.ddcDDC::600 Technik, Medizin, angewandte Wissenschaften::620 Ingenieurwissenschaftenen
dc.titleResearch data - Article "Beyond thin film limits – superhard and hydrogen-free amorphous carbon coatings with over 100 µm thickness"en
dc.typeTabular Dataen
fordatis.instituteIWS Fraunhofer-Institut für Werkstoff- und Strahltechniken
fordatis.rawdatafalseen
Appears in Collections:Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS

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