This dataset contains experimental data as a characterisation of piezoelectric microvalves. Measurement data includes the actuator stroke measured using white light profilometry, as well as fluidic measurements of generated flow, passive flow, and leakage measured using coriflow flowmeters. Experimental data before and after 10^6 actuation cycles fatigue test is supplied. An COMSOL Multiphysics project file is given as part of an evaluation of a design parameter study as well as simulation results in form of csv data. Analytical modelling of leakage rates is implemented in python scripts and associated text files contain calculation results.
The dataset contains .dat files for fluidic measurements; .txt files for stroke measurements; a .mph COMSOL Multiphysics project file with associated .csv result files, and .py Python scripts for analytical modelling. Experimental data, simulation files, and modelling files are collected in separate zip folders, respectively.