Experimental Characterization, FEA Simulation, and Analytical Modelling of Piezoelectric Microvalve with multiple Valve Seat Trenches

Abstract

This dataset contains experimental data as a characterisation of piezoelectric microvalves. Measurement data includes the actuator stroke measured using white light profilometry, as well as fluidic measurements of generated flow, passive flow, and leakage measured using coriflow flowmeters. Experimental data before and after 10^6 actuation cycles fatigue test is supplied. An COMSOL Multiphysics project file is given as part of an evaluation of a design parameter study as well as simulation results in form of csv data. Analytical modelling of leakage rates is implemented in python scripts and associated text files contain calculation results.